Highly oriented AlN thin films grown on Si(100) substrates at room temperature by pulsed laser deposition

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作者：
Physics Department, Qufu Normal University, Qufu 273165, China [1 ]
不详 [2 ]
不详 [3 ]
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来源：
Guangdianzi Jiguang | 2007年 / 10卷 / 1212-1214期
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Thin films;
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页码：1212 / 1214
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