Vacuum arc deposition I

被引:0
|
作者
Vakuumbogen-Abscheidung I [1 ]
机构
[1] Schultrich, B.
来源
Schultrich, B. | 1600年 / Wiley-VCH Verlag卷 / 28期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] PHYSICAL ASPECTS OF VACUUM-ARC COATING DEPOSITION
    Aksenov, I. I.
    Aksyonov, D. S.
    EAST EUROPEAN JOURNAL OF PHYSICS, 2014, 1 (03): : 22 - 39
  • [32] High efficient vacuum arc plant for coating deposition
    Aksenov, I. I.
    Belous, V. A.
    PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2008, (02): : 108 - 118
  • [33] Filtered vacuum arc deposition of semiconductor thin films
    Tel Aviv Univ, Tel Aviv, Israel
    IEEE Trans Plasma Sci, 6 (939-944):
  • [34] Macroparticle interaction with a substrate in cathodic vacuum arc deposition
    Keidar, M.
    Beilis, I.
    Boxman, R.L.
    Goldsmith, S.
    Surface and Coatings Technology, 1996, 86-87 (1 -3 pt 1): : 415 - 420
  • [35] Filtered vacuum arc deposition of semiconductor thin films
    Boxman, RL
    Goldsmith, S
    BenShalom, A
    Kaplan, L
    Arbilly, D
    Gidalevich, E
    Zhitomirsky, V
    Ishaya, A
    Keidar, M
    Beilis, II
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 1995, 23 (06) : 939 - 944
  • [36] Vacuum arc evaporation with programable erosion and deposition profile
    Siemroth, P
    Zimmer, O
    Schulke, T
    Vetter, J
    SURFACE & COATINGS TECHNOLOGY, 1997, 94-5 (1-3): : 592 - 596
  • [37] The electrical properties of coating obtained by vacuum arc deposition
    Novikov, V. Yu.
    Goncharov, I. Yu.
    Zakhvalinskii, V. S.
    Kolpakov, A. Y.
    Ivanov, M. B.
    Kolesnikov, D. A.
    RESULTS IN PHYSICS, 2015, 5 : 72 - 73
  • [38] Deposition of ZrNxOy films by filtered cathodic vacuum arc
    Chen, Y. M.
    Zhang, H. Q.
    Li, Z. W.
    Cao, W.
    Liao, B.
    Zhang, X.
    SURFACE ENGINEERING, 2013, 29 (08) : 567 - 571
  • [39] Review of the filtered vacuum arc process and materials deposition
    Martin, PJ
    Bendavid, A
    THIN SOLID FILMS, 2001, 394 (1-2) : 1 - 15
  • [40] Macroparticle interaction with a substrate in cathodic vacuum arc deposition
    Keidar, M
    Beilis, I
    Boxman, RL
    Goldsmith, S
    SURFACE & COATINGS TECHNOLOGY, 1996, 86 (1-3): : 415 - 420