共 50 条
- [42] Thin-film electronics by atomic layer deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2012, 30 (01):
- [44] Silicon Surface Passivation by Al2O3 film using Atomic Layer Deposition PHYSICS OF SEMICONDUCTOR DEVICES, 2014, : 387 - 390
- [49] Surface passivation of GaAs using atomic layer deposition grown MgO MATERIALS RESEARCH EXPRESS, 2015, 2 (09):
- [50] Surface passivation of aluminum hydride particles via atomic layer deposition JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2017, 35 (03):