TiNi SMA microactuator thin films by ion beam sputter deposition

被引：0
|
作者：
Tsuchiya, Kazuyoshi
Davies, Sam T.
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来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2002年 / 68卷 / 01期
关键词：
D O I：
10.2493/jjspe.68.83
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学科分类号：
摘要：
17
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页码：83 / 87
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