Ion flux impingement on the cathode surface in an axisymmetric electron gun

被引:0
|
作者
Watanabe M. [1 ]
Kusumoto Y. [1 ]
机构
[1] RandD Div., ULVAC, Inc., Chigasaki 253-8543
关键词
Cathodes - Ion bombardment - Electrons;
D O I
10.3131/jvsj2.53.132
中图分类号
学科分类号
摘要
The flow of the residual gas ion generated by a collision with high-energy electron in an axisymmetric gun was numerically investigated. Since the lifetime of the gun is dominated by the cathode damage induced by the ion bombardment, it is of industrial importance to reveal how the ions impinge on the cathode and how the inflow can be repelled. Under the normal operating condition of the electron gun (40 kV, 6 A), we determined the inflow basin, i.e. the region where the gas ions were born there and finally reached to the cathode. The basin consisted of four separated zones characterized by the potential distribution on the beam axis. To eliminate the downstream zones, it was useful to append a positive voltage imposed electrode behind the anode. The voltage necessary for repelling the ion inflow was found to be 300 V being less than 1% of the electron acceleration voltage.
引用
收藏
页码:132 / 135
页数:3
相关论文
共 50 条
  • [21] RF electron gun with driven plasma cathode
    Khodak, IV
    Kushnir, VA
    2005 IEEE PARTICLE ACCELERATOR CONFERENCE (PAC), VOLS 1-4, 2005, : 4073 - 4075
  • [22] Electron gun with cathode of carbon fibers bundle
    Baturin, AS
    Eskin, IN
    Trufanov, AI
    Chadaev, NN
    Sheshin, EP
    IVMC 2000: PROCEEDINGS OF THE 14TH INTERNATIONAL VACUUM MICROELECTRONICES CONFERENCE, 2001, : 21 - 22
  • [23] PLASMA-CATHODE ELECTRON-GUN
    BAYLESS, JR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1975, 46 (09): : 1158 - 1160
  • [24] ELECTRON-HEATED POINT CATHODE GUN
    IIYOSHI, R
    TAKEMATSU, H
    MARUSE, S
    JOURNAL OF ELECTRON MICROSCOPY, 1982, 31 (03): : 308 - 308
  • [25] Experimental study of the plasma cathode electron gun
    Xie, WL
    Li, XY
    Meng, L
    Yan, Y
    Gao, XY
    Chen, S
    Liu, SG
    INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 2002, 23 (08): : 1149 - 1158
  • [26] A PERFORATED HOLLOW CATHODE ELECTRON BEAM GUN
    WARD, GDS
    VACUUM, 1968, 18 (09) : 507 - &
  • [27] Optimization of a triode electron gun with a thermionic cathode
    Felba, J.
    Friedel, K.P.
    Wojcicki, S.
    Applied Surface Science, 1997, 111 : 126 - 134
  • [28] Pulse shaping for optimal energy deposition with a cold cathode electron gun for surface treatment
    Dobrusin, PD
    Mingolo, N
    Martínez, OE
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2003, 31 (04) : 771 - 775
  • [29] The electron beam gun with thermionic hairpin-like cathode for welding and surface modifications
    Iqbal, M
    Rafiq, M
    Bhatti, SA
    Aleem, FE
    VACUUM, 2004, 77 (01) : 19 - 26
  • [30] STABILIZATION OF TEMPERATURE OF CATHODE OF AN ELECTRON GUN HEATED BY ELECTRON BOMBARDEMENT
    SOMMERKAMP, P
    ZEITSCHRIFT FUR ANGEWANDTE PHYSIK, 1969, 26 (05): : 365 - +