Influences of ambient oxygen pressure on the crystalline orientation of CeO2/Si thin films prepared by pulsed laser deposition

被引：0

作者：

Li, Meiya

Wang, Zhonglie

Fan, Shoushan

Zhao, Qingtai

Xiong, Guangcheng

Lin, Kuixun

机构：

来源：

Gongneng Cailiao/Journal of Functional Materials | 2000年 / 31卷 / 02期

关键词：

Cerium compounds - Crystalline materials - Deposition - Oxygen - Pulsed laser applications - Silicon;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A series of CeO2 thin films were deposited on Si(100) substrates at different deposition temperatures and oxygen pressures by pulsed laser deposition. X-ray diffraction reveals that the crystalline orientation of the films grown at low oxygen pressure is (111) orientation, while that grown at a relative high oxygen pressure is (100) orientation. Oxygen pressure is important to control the crystalline orientation.

引用

页码：159 / 161

共 50 条

[31] Heteroepitaxial growth of CeO2 (001) films on Si(001) substrates by pulsed laser deposition in ultrahigh vacuum
Nagata, Hirotoshi, 1600, (30):
[32] Pulsed laser deposition of crystalline ZrC thin films
Craciun, V.
Craciun, D.
Howard, J. M.
Woo, J.
THIN SOLID FILMS, 2007, 515 (11) : 4636 - 4639
[33] Pulsed laser deposition of crystalline PZT thin films
Husmann, A
Wesner, DA
Schmidt, J
Klotzbucher, T
Mergens, M
Kreutz, EW
SURFACE & COATINGS TECHNOLOGY, 1997, 97 (1-3): : 420 - 425
[34] On the role of ambient oxygen in the formation of lead titanate pulsed laser deposition thin films
Chaoui, N
Millon, E
Muller, JF
Ecker, P
Bieck, W
Migeon, HN
APPLIED SURFACE SCIENCE, 1999, 138 : 256 - 260
[35] Effect of deposition rate on the surface morphology of CeO2 films deposited by pulsed laser deposition
Develos, KD
Kusunoki, M
Mukaida, M
Ohshima, S
PHYSICA C, 1999, 320 (1-2): : 21 - 30
[36] Effect of deposition rate on the surface morphology of CeO2 films deposited by pulsed laser deposition
Dept. of Elec. and Info. Engineering, Yamagata Univ., 4-3-16 J., Yonezawa, Japan
Phys C Supercond Appl, 1 (21-30):
[37] ZnO thin films prepared by pulsed laser deposition
Tsoutsouva, M. G.
Panagopoulos, C. N.
Papadimitriou, D.
Fasaki, I.
Kompitsas, M.
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2011, 176 (06): : 480 - 483
[38] Ferrimagnetic thin films prepared by pulsed laser deposition
Guyot, M
Lisfi, A
Krishnan, R
Porte, M
Rougier, P
Cagan, V
APPLIED SURFACE SCIENCE, 1996, 96-8 : 802 - 806
[39] Studies on the surface morphology and orientation of CeO2 films deposited by pulsed laser ablation
Develos, Katherine D.
Kusunoki, Masanobu
Ohshima, Shigetoshi
1998, JJAP, Tokyo, Japan (37):
[40] Studies on the surface morphology and orientation of CeO2 films deposited by pulsed laser ablation
Develos, KD
Kusunoki, N
Ohshima, S
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1998, 37 (11): : 6161 - 6169

← 1 2 3 4 5 →