Electrostatic field distribution measurement using MEMS micro-mirror array

被引：0
|
作者：
Kuriyama, Toshihide [1 ]
Takatsuji, Wataru [2 ]
Itoh, Takaki [2 ]
Maeda, Hiroshi [2 ]
Nakaie, Toshiyuki [3 ]
Matsui, Jun [3 ]
Miyamoto, Yoshiaki [3 ]
机构：
[1] Kuriyama, Toshihide
[2] Takatsuji, Wataru
[3] Itoh, Takaki
[4] Maeda, Hiroshi
[5] Nakaie, Toshiyuki
[6] Matsui, Jun
[7] Miyamoto, Yoshiaki
来源：
Kuriyama, Toshihide | 1600年 / Institute of Electrical Engineers of Japan卷 / 134期
关键词：
Electric fields - Electrostatics - Laser recording - Mirrors - Optical sensors - Scanning;
D O I：
10.1541/ieejsmas.134.378
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：378 / 384
相关论文
共 50 条
  • [41] Signal processing for a Rear-Projection TV using a Digital Micro-Mirror Array
    Suzuki, Y
    Minami, K
    Okumura, A
    Suzuki, Y
    Oka, S
    ICCE: 2001 INTERNATIONAL CONFERENCE ON CONSUMER ELECTRONICS, DIGEST OF TECHNICAL PAPERS, 2001, : 292 - 293
  • [42] Design of Optical System for Electrostatic Field Distribution Measurement Using Micromirror Array
    Kuriyama, Toshihide
    Aoi, Toshikazu
    Maeda, Hiroshi
    Itoh, Takaki
    Ueno, Yoshifumi
    Nakaie, Toshiyuki
    Matsui, Nobutika
    Okumura, Hiroyuki
    SENSORS AND MATERIALS, 2011, 23 (07) : 435 - 448
  • [43] Characteristics of MEMS torsion micro-mirror current sensor based on polymer material
    Wang, Ju-Feng
    Huang, Mei-Hong
    Zhuang, Lin-Ling
    Liu, Shi-Wei
    Hu, Yi-Bin
    Zhuang, Qi-Ren
    Guangdianzi Jiguang/Journal of Optoelectronics Laser, 2015, 26 (03): : 450 - 456
  • [44] Improvement of the surface characteristics of sputtered metal layer for a MEMS micro-mirror switch
    Lee, MW
    Jo, SB
    Lee, KC
    Kim, CW
    Park, SG
    Lee, SG
    Lee, EH
    O, BH
    THIN SOLID FILMS, 2004, 447 : 615 - 618
  • [45] Epitaxial Lateral Overgrowth of Gallium Nitride for Embedding the Micro-Mirror Array
    Ku, Hao Ming
    Huang, Chen Yang
    Liao, Chen Zi
    Chao, Shiuh
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2011, 50 (04)
  • [46] Towards all-Silicon Micro-Mirror Array for space applications
    Bargiel, Sylwester
    Zamkotsian, Frederic
    Gauthier-Manuel, Ludovic
    Balharet, Djaffar
    Salut, Roland
    2024 INTERNATIONAL CONFERENCE ON OPTICAL MEMS AND NANOPHOTONICS, OMN, 2024,
  • [47] An optical multiplier setup with dual digital micro-mirror array devices
    Liu, Hui-feng
    Ma, Yun-long
    Li, San-wen
    Nie, Yong-ming
    8TH INTERNATIONAL CONFERENCE ON ADVANCED INFOCOMM TECHNOLOGY (ICAIT 2015), 2016, 679
  • [48] Video processing technique for multimedia HDTV with digital micro-mirror array
    Ohara, K
    Kunzman, A
    IEEE TRANSACTIONS ON CONSUMER ELECTRONICS, 1999, 45 (03) : 604 - 610
  • [49] Scanning Micro-Mirror with an Electrostatic Spring for Compensation of Hard-Spring Nonlinearity
    Izawa, Takashi
    Sasaki, Takashi
    Hane, Kazuhiro
    MICROMACHINES, 2017, 8 (08):
  • [50] A High Stroke Actuator Micro-mirror Array Designed for Adaptive Optics
    Sun, Quan
    Yan, Baozhu
    Yang, Yi
    PROCEEDINGS OF THE 8TH INTERNATIONAL CONFERENCE ON PHOTONICS, OPTICS AND LASER TECHNOLOGY (PHOTOPTICS), 2020, : 168 - 173
12345