共 50 条
- [1] Low Temperature Direct Bonding of Polyoxymethylene (POM) through Self Assembly Monolayer (SAM) 2017 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP), 2017, : 167 - 170
- [2] Achieving low temperature Cu to Cu diffusion bonding with self assembly monolayer (SAM) passivation 2009 IEEE INTERNATIONAL CONFERENCE ON 3D SYSTEMS INTEGRATION, 2009, : 298 - +
- [3] A study on low temperature SAM modified POM direct bonding affected by VUV/O3 irradiation 2017 5TH INTERNATIONAL WORKSHOP ON LOW TEMPERATURE BONDING FOR 3D INTEGRATION (LTB-3D), 2017, : 69 - 69
- [5] Cu Surface Passivation with Self-Assembled Monolayer (SAM) and Its Application for Wafer Bonding at Moderately Low Temperature SEMICONDUCTOR WAFER BONDING 12: SCIENCE, TECHNOLOGY, AND APPLICATIONS, 2012, 50 (07): : 115 - 123
- [6] Application of Self Assembly Monolayer (SAM) in Lowering the Process Temperature during Cu-Cu Diffusion Bonding of 3D IC IMPACT: 2009 4TH INTERNATIONAL MICROSYSTEMS, PACKAGING, ASSEMBLY AND CIRCUITS TECHNOLOGY CONFERENCE, 2009, : 57 - +
- [7] Room Temperature Desorption of Self Assembly Monolayer (SAM) Passivated Cu for Lowering the Process Temperature Cu-Cu bonding of 3-D ICs 2012 INTERNATIONAL CONFERENCE ON EMERGING ELECTRONICS (ICEE), 2012,
- [8] Low temperature direct metal bonding by self assembled monolayers MATERIALS, PROCESSES, INTEGRATION AND RELIABILITY IN ADVANCED INTERCONNECTS FOR MICRO- AND NANOELECTRONICS, 2007, 990 : 287 - 293
- [9] Optimization of anodic bonding to MEMS with self-assembled monolayer (SAM) coatings RELIABILITY, TESTING AND CHARACTERIZATION OF MEMS/MOEMS, 2001, 4558 : 234 - 241
- [10] Low Temperature Bump-less Cu-Cu Bonding Enhancement with Self Assembled Monolayer (SAM) Passivation for 3-D Integration 2010 PROCEEDINGS 60TH ELECTRONIC COMPONENTS AND TECHNOLOGY CONFERENCE (ECTC), 2010, : 1364 - 1369