Fabrication of a pendulous resonant micro-machined biosensor for direct liquid detection

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作者：
Electronic Materials Research Laboratory, Xi'an Jiaotong University, Xi'an, China [1 ]
不详 [2 ]
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来源：
Key Eng Mat | / 1267-1272期
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Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
10.4028/www.scientific.net/KEM.645-646.1267
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摘要：
Hydrofluoric acid - Plasma CVD - Fabrication - Q factor measurement - Biosensors - Silicon on insulator technology - Plasma enhanced chemical vapor deposition
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