Target ablation characteristics of thin films during nanosecond pulsed laser deposition in the ablation process

被引：0
|
作者：
Tan, Xin-Yu
Zhang, Duan-Ming
Li, Zhi-Hua
Guan, Li
Li, Li
机构：
[1] Department of Physics, Huazhong University of Science and Technology, Wuhan 430074, China
[2] Department of Physics, Three Gorges University, Yichang 443002, China
来源：
Wuli Xuebao/Acta Physica Sinica | 2005年 / 54卷 / 08期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：3915 / 3921
相关论文
共 50 条
  • [41] Nanosecond laser ablation and deposition of silicon
    Wee Ong Siew
    Seong Shan Yap
    Cécile Ladam
    Øystein Dahl
    Turid Worren Reenaas
    Teck Yong Tou
    Applied Physics A, 2011, 104 : 877 - 881
  • [42] Deposition of silicon nitride films by pulsed laser ablation of the Si target in nitrogen gas
    Umezu, I
    Kohno, K
    Yamaguchi, T
    Sugimura, A
    Inada, M
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2002, 20 (01): : 30 - 32
  • [43] Pulsed laser ablation mechanisms of thin metal films
    Tóth, Z
    Hopp, B
    Szörényi, T
    Bor, Z
    Shakhno, EA
    Veiko, VP
    COMPUTER-CONTROLLED MICROSHAPING, 1999, 3822 : 18 - 26
  • [44] Y thin films grown by pulsed laser ablation
    Lorusso, A.
    Fasano, V.
    Perrone, A.
    Lovchinov, K.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2011, 29 (03):
  • [45] Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE
    HE YongNing1
    2 State Key Laboratory of Transient Optics Technology
    Science in China(Series E:Technological Sciences), 2007, (03) : 290 - 301
  • [46] Production of clusters and thin films of nitrides, oxides and carbides by pulsed laser ablation and deposition
    Orlando, S
    Paladini, A
    Santagata, A
    Marotta, V
    Parisi, GP
    Satta, M
    Scuderi, D
    Catone, D
    Giardini, A
    Mele, A
    INTERNATIONAL JOURNAL OF PHOTOENERGY, 2004, 6 (01) : 23 - 28
  • [47] Deposition of thin films for sensors by pulsed laser ablation of iron and chromium silicide targets
    Caricato, A. P.
    Luches, A.
    Romano, F.
    Mulenko, S. A.
    Kudryavtsev, Y. V.
    Gorbachuk, N. T.
    Fotakis, C.
    Papadopoulou, E. L.
    Klini, R.
    APPLIED SURFACE SCIENCE, 2007, 254 (04) : 1288 - 1291
  • [48] Thin films deposition by pulsed laser ablation: the direct simulation Monte Carlo.
    Bykov, NY
    Lukianov, GA
    XII INTERNATIONAL SYMPOSIUM ON GAS FLOW AND CHEMICAL LASERS AND HIGH-POWER LASER CONFERENCE, 1998, 3574 : 750 - 754
  • [49] Deposition of YSZ Thin Films by Atmospheric Plasma-Assisted Pulsed Laser Ablation
    Ouyang, Zihao
    Cho, Tae-Seung
    Ruzic, David N.
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2012, 40 (11) : 2850 - 2852
  • [50] Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE
    He YongNing
    Zhang JingWen
    Yang XiaoDong
    Xu QingAn
    Zhu ChangChun
    Hou Xun
    SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES, 2007, 50 (03): : 290 - 301
12345