Ion beam synthesis and electrical properties study of yttrium silicide

被引：0
|
作者：
Xie, Er-Qing [1 ]
Wang, Wen-Wu [1 ]
Jiang, Ning [1 ]
He, De-Yan [1 ]
机构：
[1] Dept. of Phys., Lanzhou Univ., Lanzhou 730000, China
来源：
Wuji Cailiao Xuebao/Journal of Inorganic Materials | 2002年 / 17卷 / 04期
关键词：
Insitu sheet resistance - Metal vapor vacuum arc implantation - Yttrium silicide;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：708 / 712
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