Investigation of reactive magnetron sputtering of indium tin oxide films on acrylics - lattice parameters and stoichiometric compositions

被引：0
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作者：
Huang, Jow-Lay [1 ]
Jah, Yin-Tsan [1 ]
Yau, Bao-Shun [1 ]
Lo, Wen-Tse [1 ]
机构：
[1] Dept. of Mat. Sci. and Engineering, National Cheng-Kung University, Tainan, 701, Taiwan
来源：
Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan | 2000年 / 108卷 / 1253期
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摘要：
27
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页码：17 / 20
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