Frequency comb profilometry

被引:0
|
作者
Hayasaki Y.
机构
关键词
Large volume metrology; Low-coherence interferometry; Optical frequency comb; Optical profilometry; Single-pixel camera;
D O I
10.2493/jjspe.84.701
中图分类号
学科分类号
摘要
[No abstract available]
引用
收藏
页码:701 / 705
页数:4
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