Frequency comb profilometry

被引：0
|
作者：
Hayasaki Y.
机构：
来源：
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2018年 / 84卷 / 08期
关键词：
Large volume metrology; Low-coherence interferometry; Optical frequency comb; Optical profilometry; Single-pixel camera;
D O I：
10.2493/jjspe.84.701
中图分类号：
学科分类号：
摘要：
[No abstract available]
引用
收藏
页码：701 / 705
页数：4
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