Relationship between the physical and structural properties of Nb z Siy Nx thin films deposited by dc reactive magnetron sputtering

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作者：
Sanjińs, R. [1 ]
Benkahoul, M. [1 ]
Sandu, C.S. [1 ]
Schmid, P.E. [1 ]
Ĺvy, F. [1 ]
机构：
[1] Ecole Polytechnique F´d´rale de Lausanne (EPFL), Institut de Physique de la Matìre Complexe, CH-1015 Lausanne, Switzerland
来源：
Journal of Applied Physics | 2005年 / 98卷 / 12期
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