共 50 条
- [3] Effect of substrate bias and oxygen partial pressure on properties of RF magnetron sputtered HfO2 thin films JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2014, 32 (03):
- [5] Addition of yttrium into HfO2 films: Microstructure and electrical properties JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2009, 27 (03): : 503 - 514
- [6] Effect of Working Pressure on Structure and Electrical Properties of Y-Doped HfO2 Thin Films Surface Technology, 2023, 52 (08): : 340 - 345and354
- [7] Electrical Properties of Schottky Devices from HfO2 and ZnO/HfO2 Thin Films: Morphological, Structural, and Optical Investigations ACS OMEGA, 2025, 10 (07): : 6520 - 6533
- [8] EFFECT OF GATE ELECTRODES ON STRUCTURE AND ELECTRICAL PROPERTIES OF SPUTTERED HfO2 THIN FILMS MODERN PHYSICS LETTERS B, 2012, 26 (25):