Design and performance of capping layers for extreme-ultraviolet multilayer mirrors

被引：0

作者：

Bajt, Saša ^{[1
]}

Chapman, Henry N. ^{[1
]}

Nguyen, Nhan ^{[1
]}

Alameda, Jennifer ^{[1
]}

Robinson, Jeffrey C. ^{[1
]}

Malinowski, Michael ^{[2
]}

Gullikson, Eric ^{[3
]}

Aquila, Andrew ^{[3
]}

Tarrio, Charles ^{[4
]}

Grantham, Steven ^{[4
]}

机构：

[1] Lawrence Livermore Natl. Laboratory, 7000 East Avenue, Livermore, CA 94550, United States

[2] Sandia National Laboratories, 7011 East Avenue, Livermore, CA 94550, United States

[3] Lawrence Berkeley Natl. Laboratory, Center for X-ray Optics, Berkeley, CA 94720, United States

[4] Natl. Inst. of Std. and Technology, Gaithersburg, MD 20899, United States

来源：

Applied Optics | 2003年 / 42卷 / 28期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Multilayers

引用

页码：5750 / 5758

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