Characteristics of extreme ultraviolet emission from CO2laser-produced plasma

被引：0

作者：

Takahashi, Akihiko ^{[1
,4
]}

Tanaka, Hiroki ^{[2
,5
]}

Hashimoto, Yuuki ^{[3
,4
]}

Okada, Tatsuo ^{[3
,4
]}

机构：

[1] Department of Health Sciences, School of Medicine, Kyushu University, 3-1-1 Maidashi, Higashi-ku, Fukuoka 812-8582, Japan

[2] Industrial Technology Center of Nagasaki, 2-1303-8 Ikeda, Ohmura, Nagasaki 856-0026, Japan

[3] Graduate School of Information Science and Electrical Engineering, Kyushu University, 6-10-1 Hakozaki, Higashi-ku, Fukuoka 812-8581, Japan

[4] Kyushu University, Japan

[5] Industrial Technology Center of Nagasaki, Japan

来源：

IEEJ Transactions on Electronics, Information and Systems | 2007年 / 127卷 / 02期

关键词：

Light emission - Lithography - Solid state lasers - Ultraviolet radiation;

D O I：

10.1541/ieejeiss.127.155

中图分类号：

学科分类号：

摘要：

In the development of extreme ultraviolet (EUV) lithography source using laser-produced plasma (LPP), it is important to investigate the optimum wavelength of the driver laser to obtain the high conversion efficiency. We have proposed the EUV generation pumped by CO2laser-produced plasma. In this article, we show the characteristics of EUV emission from gas and solid Xe irradiated by a TEA CO2laser. The conversion efficiency to 13.5 nm was ∼0.2%. This value is comparable to those of Nd: YAG LPP with Xe in early works. In order to gain insight into the difference between the CO2LPP and Nd:YAG LPP, we investigated the emission characteristics from Nd: YAG LPP and CO2LPP with solid tin under the same experimental setup. As the results, we confirmed that the conversion efficiency of CO2LPP is comparable to that of Nd: YAG LPP. The conversion efficiency was estimated to be 2% in maximum.

引用

页码：155 / 159

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