Treatment of fluorocarbon using nonthermal plasma produced by atmospheric discharge

被引：0

作者：

Hayashi, Nobuya ^{[1
]}

Yamamoto, Kazuhiro ^{[1
]}

Ihara, Satoshi ^{[1
]}

Kamatani, Masaki ^{[1
]}

Satoh, Saburoh ^{[1
]}

Yamabe, Chobei ^{[1
]}

机构：

[1] Dept. of Elec. and Electronic Eng., Faculty of Science and Engineering, Saga University, 1 Honjyo-machi, Saga 840-8502, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 08期

关键词：

Atmospheric pressure - Decomposition - Electric corona - Electric discharges - Fourier transform infrared spectroscopy - Plasma applications;

D O I：

10.1143/jjap.41.5399

中图分类号：

学科分类号：

摘要：

A nonthermal plasma produced by the streamer corona discharge at an atmospheric pressure was investigated for the treatment of fluorocarbon. The effective treatment of fluorocarbons was performed by controlling the discharge parameters of the plasma. The decomposition rate of fluorocarbon was investigated by varying (a) discharge modes, (b) dilution gases and (c) discharge characteristics, that is, applied voltage VA-K of the main discharge gap and its steepness dVA-K/dt. The maximum decomposition rate of 92% was achieved by the streamer corona discharge.

引用

页码：5399 / 5403

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