Effect of argon addition on single crystal diamond synthesized by microwave plasma CVD

被引:0
|
作者
Hubei Province Key Laboratory of Plasma Chemistry and Advanced Materials, Wuhan Institute of Technology, Wuhan, China [1 ]
不详 [2 ]
机构
来源
Rengong Jingti Xuebao | / 2卷 / 337-341期
关键词
Compendex;
D O I
暂无
中图分类号
学科分类号
摘要
Growth rate
引用
收藏
相关论文
共 50 条
  • [21] Effect of growth parameters on single crystal diamond deposition by DC Arc Plasma Jet CVD
    Hei, Lifu
    Liu, Jie
    Lu, Fanxiu
    Li, Chengming
    Song, Jianhua
    Chen, Guangchao
    MECHATRONICS AND INTELLIGENT MATERIALS II, PTS 1-6, 2012, 490-495 : 3094 - +
  • [22] EFFECT OF OXYGEN ADDITION ON MICROWAVE PLASMA CVD OF DIAMOND FROM CH4-H2 MIXTURE
    CHEN, CF
    HUANG, YC
    HOSOMI, S
    YOSHIDA, I
    MATERIALS RESEARCH BULLETIN, 1989, 24 (01) : 87 - 94
  • [23] Diamond growth by microwave plasma enhanced chemical vapour deposition: Optical emission characterisation and effect argon addition
    Mortet, V
    Hubicka, Z
    Vorlicek, V
    Jurek, K
    Rosa, J
    Vanecek, M
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2004, 201 (11): : 2425 - 2431
  • [24] Spectrometers of Neutrons and Fast Atoms of Tokamak Thermonuclear Plasma Based on CVD Synthesized Diamond Single-Crystal Films
    Kirichenko, A. N.
    Krasilnikov, A. V.
    Rodionov, N. B.
    Rodionova, V. P.
    Trapeznikov, A. G.
    Yartsev, V. P.
    Meshchaninov, S. A.
    Artemev, K. K.
    Khmel'nitskii, R. A.
    Amosov, V. N.
    PLASMA PHYSICS REPORTS, 2024, 50 (04) : 508 - 513
  • [25] Formation of diamond and nanocrystalline diamond films by microwave plasma CVD
    Hiramatsu, M
    Lau, CH
    Bennett, A
    Foord, JS
    THIN SOLID FILMS, 2002, 407 (1-2) : 18 - 25
  • [26] Predominant physical quantity dominating macroscopic surface shape of diamond synthesized by microwave plasma CVD
    Yamada, Hideaki
    Mokuno, Yoshiaki
    Chayahara, Akiyoshi
    Horino, Yuji
    Shikata, Shin-ichi
    DIAMOND AND RELATED MATERIALS, 2007, 16 (03) : 576 - 580
  • [27] Nanocrystalline diamond film produced by argon addition in the CH4-H2 microwave CVD plasmas
    Askari, Syed Jawid
    Lu, Fanxiu
    ADVANCED MATERIALS AND PROCESSING, 2007, 26-28 : 615 - +
  • [28] Development of single-crystalline diamond wafers: Enlargement of crystal size by microwave plasma CVD and wafer fabrication technology
    Chayahara, Akiyoshi
    Mokuno, Yoshiaki
    Tsubouchi, Nobuteru
    Yamada, Hideaki
    Synthesiology, 2010, 3 (04): : 272 - 280
  • [29] Effect of bias enhanced nucleation on the nucleation density of diamond in microwave plasma CVD
    Ma, Y
    Tsurumi, T
    Shinoda, N
    Fukunaga, O
    DIAMOND AND RELATED MATERIALS, 1995, 4 (12) : 1325 - 1330
  • [30] Single crystal CVD diamond growth and characterizations
    Tranchant, Nicolas Olivier
    Tromson, Dominique
    Remes, Zdenek
    Rocha, Licinio
    Nesladek, Milos
    Bergonzo, Philippe
    DIAMOND ELECTRONICS - FUNDAMENTALS TO APPLICATIONS, 2007, 956 : 177 - +