Effect of rapid thermal processing at high temperature on generation and annihilation of thermal donors

被引：0
|
作者：
Pei, Yanli [1 ]
Yang, Deren [1 ]
Ma, Xiangyang [1 ]
Fan, Ruixin [1 ]
Que, Duanlin [1 ]
机构：
[1] Lab. of Silicon Mat., Zhejiang Univ., Hangzhou 310027, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2003年 / 24卷 / 10期
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学科分类号：
摘要：
18
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页码：1035 / 1039
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