Review of simulation and modeling techniques for silicon Czochralski crystal growth

被引：0
|
作者：
Dezfoli, Amir Reza Ansari [1 ,2 ]
机构：
[1] Natl Chin Yi Univ Technol, Dept Intelligent Automat Engn, Taichung, Taiwan
[2] Natl Chin Yi Univ Technol, Grad Inst Precis Mfg, PhD Program, Taichung, Taiwan
来源：
JOURNAL OF CRYSTAL GROWTH | 2024年 / 648卷
关键词：
HEAT-TRANSFER; OXYGEN-TRANSPORT; MELT CONVECTION; CZ; SHAPE;
D O I：
10.1016/j.jcrysgro.2024.127921
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
引用
收藏
页数：7
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