Growth mechanism of microcrystalline silicon films by scaling theory and monte carlo simulation

被引：0
|
作者：
Zi, Wei [1 ]
Zhou, Yuqin [1 ]
Liu, Fengzhen [1 ]
Zhu, Meifang [1 ]
机构：
[1] College of Physical Science, Graduate University, Chinese Academy of Sciences, Beijing 100049, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2008年 / 29卷 / 08期
关键词：
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学科分类号：
摘要：
Atomic force microscopy
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页码：1465 / 1468
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