Growth mechanism of microcrystalline silicon films by scaling theory and monte carlo simulation

被引：0
|
作者：
Zi, Wei [1 ]
Zhou, Yuqin [1 ]
Liu, Fengzhen [1 ]
Zhu, Meifang [1 ]
机构：
[1] College of Physical Science, Graduate University, Chinese Academy of Sciences, Beijing 100049, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 2008年 / 29卷 / 08期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Atomic force microscopy
引用
收藏
页码：1465 / 1468
相关论文
共 50 条
  • [1] Monte Carlo simulation of silicon nanowhiskers growth
    Nastovjak, Alla G.
    Shwartz, Nataliya L.
    Zverev, Alexey V.
    EDM 2007: 8TH INTERNATIONAL WORKSHOP AND TUTORIALS ON ELECTRON DEVICES AND MATERIALS, 2007, : 45 - +
  • [2] Scaling behavior of large scale growth of the microcrystalline silicon films
    Zhao, W.
    Chen, J.
    Song, S.
    Xu, L.
    Hong, T.
    Zhang, X.
    OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS, 2011, 5 (3-4): : 231 - 234
  • [3] Monte Carlo simulation of thin films growth
    Yang, N
    Chen, GH
    Zhang, Y
    Gong, WB
    Zhu, HS
    ACTA PHYSICA SINICA, 2000, 49 (11) : 2225 - 2229
  • [4] MONTE-CARLO SIMULATION OF GROWTH AND RECOVERY OF SILICON
    KERSULIS, S
    MITIN, V
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1995, 29 (1-3): : 34 - 37
  • [5] Monte Carlo simulation of nucleation and growth of thin films
    J Goswami
    G Ananthakrishna
    S A Shivashankar
    Bulletin of Materials Science, 1997, 20 : 823 - 843
  • [6] Monte Carlo simulation of nucleation and growth of thin films
    Goswami, J
    Ananthakrishna, G
    Shivashankar, SA
    BULLETIN OF MATERIALS SCIENCE, 1997, 20 (06) : 823 - 843
  • [7] MECHANISM OF THE GROWTH OF MICROCRYSTALLINE SILICON
    JANG, J
    KOH, SO
    KIM, TG
    KIM, SC
    APPLIED PHYSICS LETTERS, 1992, 60 (23) : 2874 - 2876
  • [8] MONTE-CARLO SIMULATION AND DYNAMIC SCALING OF SURFACES IN MBE GROWTH
    PAL, S
    LANDAU, DP
    PHYSICAL REVIEW B, 1994, 49 (15): : 10597 - 10606
  • [9] Investigation of the Details of Silicon Nanowhisker Growth by Monte Carlo Simulation
    Nastovjak, Alla G.
    Neizvestny, Igor G.
    Shwartz, Nataliya L.
    2009 INTERNATIONAL SCHOOL AND SEMINAR ON MODERN PROBLEMS OF NANOELECTRONICS, MICRO- AND NANOSYSTEM TECHNOLOGIES, 2009, : 47 - 49
  • [10] Kinetic Monte Carlo simulation of the growth of polycrystalline Cu films
    Wang, LG
    Clancy, P
    SURFACE SCIENCE, 2001, 473 (1-2) : 25 - 38
12345