New emissive probe measurements of electron temperature in two modes of radio-frequency plasmas

被引：0
|
作者：
Kusaba, Kouta [1 ]
Shindo, Haruo [1 ]
机构：
[1] Department of Information Telecommunication and Electronics, Tokai University, 1117 Kita-kaname, Hiratsuka, Kanagawa 259-1292, Japan
来源：
Japanese Journal of Applied Physics | 2009年 / 48卷 / 02期
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
026001
中图分类号：
学科分类号：
摘要：
Electron energy levels - Probes - Temperature measurement - Radio waves
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