Single-component molecular resists containing bound photoacid generator functionality

被引：0
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作者：
Lawson, Richard A. [1 ]
Tolbert, Laren M. [1 ]
Henderson, Clifford L. [1 ]
机构：
[1] Georgia Institute of Technology, School of Chemical and Biomolecular Engineering, Atlanta, GA 30332-0100, United States
来源：
Journal of Micro/Nanolithography, MEMS, and MOEMS | 2010年 / 9卷 / 01期
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