Development of an interferometric coordinate measuring machine used for step-gague calibration

被引：2
|
作者：
Osawa, Sonko
Takatsuji, Toshiyuki
Kurosawa, Tombo
机构：
来源：
| 2002年 / Japan Society for Precision Engineering卷 / 68期
关键词：
All Open Access; Bronze;
D O I：
10.2493/jjspe.68.687
中图分类号：
学科分类号：
摘要：
Coordinate measuring machines
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