Development of an interferometric coordinate measuring machine used for step-gague calibration

被引:2
|
作者
Osawa, Sonko
Takatsuji, Toshiyuki
Kurosawa, Tombo
机构
来源
| 2002年 / Japan Society for Precision Engineering卷 / 68期
关键词
All Open Access; Bronze;
D O I
10.2493/jjspe.68.687
中图分类号
学科分类号
摘要
Coordinate measuring machines
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