Molecular dynamics of polymer's interface behaviour in the nanoimprint lithography

被引：0
|
作者：
Xiong, Xiaodong [1 ]
Wei, Zhengying [1 ]
Du, Jun [1 ]
Ding, Yucheng [1 ]
机构：
[1] State Key Laboratory of Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
来源：
Gaofenzi Cailiao Kexue Yu Gongcheng/Polymeric Materials Science and Engineering | 2011年 / 27卷 / 06期
关键词：
Degree of polymerization - Interaction energies - Interface behaviour - Key factors - Pattern quality - Polydimethylsiloxane PDMS - UV nanoimprint lithography;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：186 / 190
相关论文
共 50 条
  • [21] Durability of nitrided fluorocarbon polymer films for nanoimprint lithography
    Kim, Han-Hyoung
    Park, Se-Geun
    Lee, El-Hang
    Lee, Seung-Gol
    O, Beom-Hoan
    THIN SOLID FILMS, 2011, 519 (16) : 5490 - 5493
  • [22] Computational study on polymer filling process in nanoimprint lithography
    Yasuda, Masaaki
    Araki, Kosei
    Taga, Akihiro
    Horiba, Akira
    Kawata, Hiroaki
    Hirai, Yoshihiko
    MICROELECTRONIC ENGINEERING, 2011, 88 (08) : 2188 - 2191
  • [23] Characterisation of new thermosetting polymer materials for nanoimprint lithography
    Lyebyedyev, D
    Schulz, H
    Scheer, HC
    Pfeiffer, K
    MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2001, 15 (1-2): : 241 - 243
  • [24] Deformation Mechanism of Aluminum, Copper, and Gold in Nanoimprint Lithography Using Molecular Dynamics Simulation
    Gaikwad, Abhaysinh
    Olowe, Michael
    Desai, Salil
    NANOMATERIALS, 2023, 13 (24)
  • [25] Simulation and experimental study of polymer deformation in nanoimprint lithography
    Hirai, Y
    Konishi, T
    Yoshikawa, T
    Yoshida, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (06): : 3288 - 3293
  • [26] Locally controlling the orientation of polymer crystals by nanoimprint lithography
    Hu, Zhijun
    Chen, Jian
    Bayot, Vincent
    Jonas, Alain M.
    ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2006, 62 : S10 - S10
  • [27] Study on polymer and process design in thermal nanoimprint lithography
    Shibata, Mayuko
    Tanabe, Toshiaki
    Kimoto, Yoshihisa
    Kawata, Hiroaki
    Hirai, Yoshihiko
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2008, 21 (04) : 601 - 606
  • [28] Polymer Microring Resonators for Biosensing Applications by Nanoimprint Lithography
    Morarescu, R.
    Pal, P. K.
    Han, X.
    Zhao, M.
    Bienstman, P.
    Morthier, G.
    2015 17th International Conference on Transparent Optical Networks (ICTON), 2015,
  • [29] Relaxation Behavior of polymer structures fabricated by nanoimprint lithography
    Ding, Yifu
    Ro, Hyun Wook
    Germer, Thomas A.
    Douglas, Jack F.
    Okerberg, Brian C.
    Karim, Alamgir
    Soles, Christopher L.
    ACS NANO, 2007, 1 (02) : 84 - 92
  • [30] Polymer viscoelasticity and residual stress effects on nanoimprint lithography
    Ding, Yifu
    Ro, Hyun Wook
    Douglas, Jack F.
    Jones, Ronald L.
    Hine, Daniel R.
    Karim, Alamgir
    Soles, Christopher L.
    ADVANCED MATERIALS, 2007, 19 (10) : 1377 - +
12345