Molecular dynamics of polymer's interface behaviour in the nanoimprint lithography

被引：0
|
作者：
Xiong, Xiaodong [1 ]
Wei, Zhengying [1 ]
Du, Jun [1 ]
Ding, Yucheng [1 ]
机构：
[1] State Key Laboratory of Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China
来源：
Gaofenzi Cailiao Kexue Yu Gongcheng/Polymeric Materials Science and Engineering | 2011年 / 27卷 / 06期
关键词：
Degree of polymerization - Interaction energies - Interface behaviour - Key factors - Pattern quality - Polydimethylsiloxane PDMS - UV nanoimprint lithography;
D O I：
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学科分类号：
摘要：
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页码：186 / 190
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