Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped target

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作者：
Liu, Cheng-Sen
Wang, De-Zhen
Liu, Tian-Wei
Wang, Yan-Hui
机构：
[1] College of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, China
[2] State Key Laboratory for Materials Modification by Laser, Ion and Electron Beams, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116023, China
[3] State Key Laboratory of Surface Physics and Chemistry, China Academy of Engineering Physics, Mianyang 621900, China
来源：
Wuli Xuebao/Acta Physica Sinica | 2008年 / 57卷 / 10期
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页码：6450 / 6456
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