Mechanical-magnetic coupling macromodel for a magnetic microbeam actuator

A mechanical-magnetic coupling macromodel for a magnetic microactuator with a multilevel meander is presented. The deformation curve of a microbeam is approximated by linear combination of modal functions for the cantilever-beam. The integration for the magnetic force is calculated by dividing the microbeam into several intervals, and the nonlinear equation set has been developed based on the magnetic circuit principle. The complexity of the macromodel depends on the selection of modal number. In comparison with previous conventional models, this macromodel accounts for the coupling between the beam deflection and magnetic force. The macromodel is validated by comparing its result with experimental results available in some literatures.