Influence of RF-power on microstructure and properties of microcrystalline silicon thin films

被引：0
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作者：
Zhang, Lin-Rui [1 ]
Zhou, Bing-Qing [1 ]
Zhang, Li-Li [1 ]
Li, Hai-Quan [1 ]
机构：
[1] Key Laboratory of Physics and Chemistry for Functional Material, College of Physics and Electron Information of Inner Mongolia Normal University, Huhhot 010022, China
来源：
Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2013年 / 42卷 / 03期
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页码：418 / 422
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