Particle-in-cell simulation of plasma immersion ion implantation (PIII) of industrial gears

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作者：
Kwok, Dixon T.K. [1 ]
Chu, Paul K. [1 ]
机构：
[1] City Univ of Hong Kong, Hong Kong, Hong Kong
来源：
IEEE International Conference on Plasma Science | 2000年
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摘要：
Plasma applications
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