Particle-in-cell simulation of plasma immersion ion implantation (PIII) of industrial gears

被引：0
|
作者：
Kwok, Dixon T.K. [1 ]
Chu, Paul K. [1 ]
机构：
[1] City Univ of Hong Kong, Hong Kong, Hong Kong
来源：
IEEE International Conference on Plasma Science | 2000年
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Plasma applications
引用
收藏
相关论文
共 50 条
  • [1] Plasma immersion ion implantation of industrial gears
    Zeng, ZM
    Fu, RKY
    Tian, XB
    Chu, PK
    SURFACE & COATINGS TECHNOLOGY, 2004, 186 (1-2): : 260 - 264
  • [2] Particle-in-cell and Monte Carlo simulation of the hydrogen plasma immersion ion implantation process
    Kwok, DTK
    Chu, PK
    Wood, BP
    Chan, C
    JOURNAL OF APPLIED PHYSICS, 1999, 86 (04) : 1817 - 1821
  • [3] Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation
    Huang, Y. X.
    Tian, X. B.
    Yang, S. Q.
    Fu, Ricky K. Y.
    Chu, Paul K.
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (9-11): : 5458 - 5462
  • [4] 2D particle-in-cell simulation of plasma immersion ion implantation and dose distribution
    Department of Materials Science, Fudan University, Shanghai 200433, China
    Zhenkong Kexue yu Jishu Xuebao, 2006, 4 (303-307):
  • [5] Particle-in-cell simulation of an electron shock wave in a rapid rise time plasma immersion ion implantation process
    Meige, A
    Jarnyk, M
    Kwok, DTK
    Boswell, RW
    PHYSICS OF PLASMAS, 2005, 12 (04) : 1 - 4
  • [6] APPLICATION OF PARTICLE-IN-CELL SIMULATION TO PLASMA SOURCE ION-IMPLANTATION
    FAEHL, R
    DEVOLDER, B
    WOOD, B
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (02): : 884 - 888
  • [7] PLASMA IMMERSION ION-IMPLANTATION (PIII) OF METALS
    BLAWERT, C
    KNOOP, FM
    MORDIKE, BL
    METALL, 1995, 49 (01): : 45 - 50
  • [8] Investigation of plasma immersion ion implantation of nickel-titanium rod by multiple-grid particle-in-cell simulation
    Kwok, Dixon T. K.
    Wu, Shuilin
    Liu, Xiangmei
    Fu, Ricky K. Y.
    Chu, Paul K.
    JOURNAL OF APPLIED PHYSICS, 2008, 103 (05)
  • [9] Characteristics of plasma immersion ion implantation with a nanosecond rise-time pulse: particle-in-cell simulations
    Sun, Jizhong
    Sang, Chaofeng
    Stirner, Thomas
    Wang, Dezhen
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2010, 43 (27)
  • [10] Active and passive plasma spectroscopy in a plasma immersion ion implantation (PIII) experiment
    Ueda, M.
    Stellati, C.
    Spassov, V.A.
    Barroso, J.J.
    Nono, M.C.A.
    Surface and Coatings Technology, 1999, 112 (01): : 310 - 313
12345