Influence of hydrogen annealing temperature on the optical and electrical properties of ZnO thin films prepared by magnetron sputtering

被引:0
|
作者
Ma, Ming [1 ]
Gao, Chuan-Yu [1 ]
Zhou, Ming [2 ,3 ]
Li, Bao-Jia [2 ,3 ]
Li, Hao-Hua [2 ,3 ]
机构
[1] Department of Mechanical Engineering, Jiangsu University, Zhenjiang 212013, China
[2] Department of Material Science and Engineering, Jiangsu University, Zhenjiang 212013, China
[3] Key Laboratory of Center for Photo Manufacture Science and Technology of Jiangsu Province, Zhenjiang 212013, China
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关键词
D O I
10.3969/j.issn.1001-9731.2013.15.030
中图分类号
学科分类号
摘要
24
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页码:2268 / 2270
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