A novel rapid micromotion compensator for high-precision chip bonding manufacturing

被引：0
|
作者：
Zhang, Lanyu [1 ]
Gao, Jian [1 ]
机构：
[1] State Key Laboratory of Precision Electronic Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou,Guangdong,510006, China
来源：
Precision Engineering | 2021年 / 71卷
关键词：
Compilation and indexing terms; Copyright 2024 Elsevier Inc;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Errors - Microelectronics - Piezoelectricity - Frequency response
引用
收藏
页码：282 / 292
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