Analysis of air damping force in micro-electro-mechanical system

被引：0
|
作者：
School of Aerospace Science and Engineering, Beijing Institute of Technology, Beijing 100081, China [1 ]
机构：
来源：
Dongbei Daxue Xuebao | 2008年 / SUPPL.卷 / 4-6期
关键词：
9;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：4 / 6
相关论文
共 50 条
  • [21] Optical characterization of micro-electro-mechanical structures
    Annovazzi-Lodi, V
    Benedetti, M
    Merlo, S
    Norgia, M
    Vigna, B
    Sassolini, S
    OPTICAL MICRO- AND NANOMETROLOGY IN MANUFACTURING TECHNOLOGY, 2004, 5458 : 196 - 207
  • [22] Quantum control spectroscopy (QCS) with a micro-electro-mechanical system (MEMS)
    Buckup, T.
    Moehring, J.
    Motzkus, M.
    MEMS ADAPTIVE OPTICS III, 2009, 7209
  • [23] Fatigue of LIGA Ni Micro-Electro-Mechanical System Thin Films
    Y. Yang
    S. Allameh
    J. Lou
    B. Imasogie
    B.L. Boyce
    W.O. Soboyejo
    Metallurgical and Materials Transactions A, 2007, 38 : 2340 - 2348
  • [24] Examination of a micro-electro-mechanical system based on a portable respiratory monitoring system
    Sung, Jiwon
    Yoon, Myonggeun
    Do Huh, Hyun
    Shin, Dong Oh
    Chung, Weon Kuu
    Kim, Dong Wook
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2015, 67 (04) : 752 - 756
  • [25] Development of micro-electro-mechanical optical scanner
    Motamedi, ME
    Park, S
    Wang, AH
    Dadkhah, MS
    Andrews, AP
    Marcy, HO
    Khoshnevisan, M
    Chiou, AE
    Huhn, RJ
    Sell, CF
    Smits, JG
    OPTICAL ENGINEERING, 1997, 36 (05) : 1346 - 1353
  • [26] Micro-electro-mechanical (MEM) diode switch
    Acquaviva, D.
    Bouvet, D.
    Tsamados, D.
    Coronel, P.
    Skotnicki, T.
    Ionescu, A. M.
    MICROELECTRONIC ENGINEERING, 2009, 86 (4-6) : 1074 - 1077
  • [27] A Novel Approach for Micro-electro-mechanical System(MEMS) Vacuum Packaging
    WANG Cheng-gang
    International Journal of Plant Engineering and Management, 2008, (03) : 148 - 153
  • [28] Modeling and simulation for electrostatically driven micro-electro-mechanical (MEMS) system
    Ha, T
    Kwon, O
    Kim, J
    Oh, J
    Won, T
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S676 - S680
  • [29] Magnetic energy coupling system based on micro-electro-mechanical system coils
    Li, Xiuhan
    Yuan, Quan
    Yang, Tianyang
    Liu, Jian
    Zhang, Haixia
    JOURNAL OF APPLIED PHYSICS, 2012, 111 (07)
  • [30] Residual stresses in micro-electro-mechanical systems
    Qian, Jin
    Liu, Cheng
    Zhang, Dacheng
    Zhao, Yapu
    Journal of Mechanical Strength, 2001, 23 (04) : 393 - 401
12345