Precision angle sensor and its calibration techniques

被引：0

作者：

Ma, J.S. ^{[1
]}

Wang, X.Z. ^{[1
]}

Fang, Z.J. ^{[1
]}

Zhang, S.Z. ^{[1
]}

Satoshi, K. ^{[1
]}

机构：

[1] Inst. of Opt. and Fine Mech., Chinese Acad. of Sci., Shanghai 201800, China

来源：

Guangxue Xuebao/Acta Optica Sinica | 2001年 / 21卷 / 02期

关键词：

Calibration - Error compensation - Light reflection - Optical variables measurement - Sensitivity analysis;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A high-precision angle sensor and a new method for calibrating precision angle sensor without any accurate reference instruments were described. Two angle sensors with compensating devices which compensate the thermal drift of light source were developed and calibrated by themselves. The measurement ranges of the two angle sensors are 180'', and the resolutions are 0.003'' and 0.004'' respectively. The repeatability error of the evaluated mean sensitivity was improved to 0.015% by compensating device. The repeatability of the calibrated linearity error was reduced to 0.015''.

引用

页码：232 / 235

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