Interconnection of fine lines to micro vias in high density multilayer LTCC substrates

被引:0
|
作者
Ceramic Electronics Packaging Laboratory , Department of Electrical Engineering, University of Arkansas, 3217 Bell Engineering Center, Fayetteville, AR 72701, United States [1 ]
机构
来源
International Microelectronics and Packaging Society (IMAPS) | 1600年 / 810-815卷 / 2005期
关键词
Compendex;
D O I
38th International Symposium on Microelectronics, IMAPS 2005
中图分类号
学科分类号
摘要
Ceramic materials - Electric inductors - Microelectronics - Alignment - Multilayers - Integrated circuit interconnects - Chains - Silver - Coplanar waveguides - Temperature
引用
收藏
相关论文
共 47 条
  • [1] High performance thermal vias in LTCC substrates
    Zampino, MA
    Kandukuri, R
    Jones, WK
    ITHERM 2002: EIGHTH INTERSOCIETY CONFERENCE ON THERMAL AND THERMOMECHANICAL PHENOMENA IN ELECTRONIC SYSTEMS, PROCEEDINGS, 2002, : 179 - 185
  • [2] THE CHARACTERISTICS OF FINE-LINES ON MULTILAYER SUBSTRATES
    LERER, AM
    MIKHALEVSKY, VS
    TSYUPKO, AS
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII RADIOFIZIKA, 1985, 28 (02): : 251 - 254
  • [3] LTCC materials for high density multilayer interconnect
    Hsu, JY
    Ko, WS
    Lin, HC
    Huang, YT
    Lee, YJ
    Hsu, CJ
    Hung, YC
    2000 HD INTERNATIONAL CONFERENCE ON HIGH-DENSITY INTERCONNECT AND SYSTEMS PACKAGING, 2000, 4217 : 573 - 578
  • [4] High density thermal vias in low temperature cofire ceramic (LTCC)
    Kandukuri, R
    Liu, YQ
    Zampino, M
    Jones, WK
    2002 INTERNATIONAL SYMPOSIUM ON MICROELECTRONICS, PROCEEDINGS, 2002, 4931 : 415 - 420
  • [5] Thin-film fine-pattern technology for LTCC multilayer substrates
    Anderson, Brian
    Horio, Shuichi
    Kobayashi, Kyoji
    Tamada, Nobuhiko
    57th Electronic Components & Technology Conference, 2007 Proceedings, 2007, : 59 - 64
  • [6] Thermal management in low temperature cofire ceramic (LTCC) using high density thermal vias and micro heat pipes/spreaders
    Jones, WK
    Liu, YQ
    2002 INTERNATIONAL CONFERENCE ON ADVANCED PACKAGING AND SYSTEMS, PROCEEDINGS, 2002, 4828 : 207 - 212
  • [7] HIGH-DENSITY MULTILAYER CERAMIC SUBSTRATES
    FUJITA, T
    KUROKI, T
    HIROTA, K
    TODA, G
    ISHIARA, S
    AMERICAN CERAMIC SOCIETY BULLETIN, 1980, 59 (03): : 378 - 378
  • [8] Large area LTCC substrate and high density off-module interconnection developments
    Palmer, EG
    Newton, CM
    1999 INTERNATIONAL CONFERENCE ON HIGH DENSITY PACKAGING AND MCMS, PROCEEDINGS, 1999, 3830 : 289 - 294
  • [9] Fine-pitch Solder Joining for High Density Interconnection
    Sueoka, Kuniaki
    Kohara, Sayuri
    Horibe, Akihiro
    Yamada, Fumiaki
    Mori, Hiroyuki
    Orii, Yasumitsu
    2014 INTERNATIONAL CONFERENCE ON ELECTRONICS PACKAGING (ICEP), 2014, : 600 - 603
  • [10] Fabrication of Ultra-Fine Micro-Vias in Non-Photosensitive Polyimide for High-Density Vertical Interconnects
    Wang, Yao
    Hu, Chuan
    Xiang, Xun
    Zheng, Wei
    Yin, Zhendong
    Cui, Yinhua
    MICROMACHINES, 2022, 13 (12)