Megasonics-based cleaning

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作者：
机构：
[1] [1,Rosato, John J.
[2] Yalamanchili, M. Rao
来源：
Rosato, J.J. (jrosato@scpglobal.com) | 2005年 / PennWell Publishing Co.卷 / 48期
关键词：
High-power megasonic energy - Megasonics - Particle-removal efficiency (PRE) - Single-wafer cleaning;
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