Capacitive pressure sensor with circular island structure

被引：0
|
作者：
Zou, Li-Ming [1 ]
Guo, Hang [1 ]
机构：
[1] Pen-Tung Sah MEMS Research Center, Xiamen University, Xiamen 361005, China
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2009年 / 17卷 / 06期
关键词：
Capacitive pressure sensors - General structures - Island structure - Least square methods - Linearity - Output nonlinearities - Silicon Nitride Film - Stray capacitances;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：1385 / 1390
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