Two-dimensional simulation of ion energy and angular distributions at the wafer in low-pressure RF discharges

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作者：
Hu, Y. [1 ]
Lin, T.L. [1 ]
Huang, C.Y. [1 ]
机构：
[1] Natl Tsing Hua Univ, Hsinchu, Taiwan
来源：
IEEE International Conference on Plasma Science | 2000年
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