The effect of deposition temperature on the electrical and physical properties of the Ba(Zr, Ti)O3 thin films

被引：21
|
作者：
Seok Choi, Won [1 ]
Sik Jang, Bum [1 ]
Roh, Yonghan [1 ]
Yi, Junsin [1 ]
Hong, Byungyou [1 ]
机构：
[1] School of Electrical and Computer Engineering, Sungkyunkwan University, Suwon 440-746, Korea, Republic of
来源：
| 2002年 / Elsevier卷 / 303期
关键词：
D O I：
10.1016/S0022-3093(02)00984-5
中图分类号：
学科分类号：
摘要：
Thin films
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