Study on the linearly range of S-shaped MEMS planar micro-spring

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National Lab of Mechatronic Engineering and Control, Beijing Institute of Technology, Beijing, China [1 ]
不详 [2 ]
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Telkomnika | 2012年 / 6卷 / 1327-1332期
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摘要：
For the lack of formula of linear range for S-shaped MEMS planar micro-spring, this paper establishes physical and mathematical model and analysis the material stress-strain angle. The formula is deduced by calculating the strain and rotation of the basic unit of micro-spring tension. Compared with the results of the tests on micro-spring which produced by UV-LIGA process, the formula results is in about 10% higher, providing theoretical guidance for the design and application of S-shaped MEMS planar micro-spring in engineering practice. © 2012 Universitas Ahmad Dahlan.
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