Effects of deposition temperature on electrical properties of hydrogenated amorphous carbon films

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作者：
Cheng, Shanhua
Ning, Zhaoyuan
Kang, Jian
Ma, Chunlan
Ye, Chao
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Wuli Xuebao/Acta Physica Sinica | 2000年 / 49卷 / 10期
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页码：2041 / 2046
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