Outperforming piezoelectric ultrasonics with high-reliability single-membrane CMUT array elements

被引：0
|
作者：
Dew, Eric B. [1 ]
Kashani Ilkhechi, Afshin [1 ]
Maadi, Mohammad [1 ]
Haven, Nathaniel J. M. [1 ]
Zemp, Roger J. [1 ]
机构：
[1] Department of Electrical and Computer Engineering, University of Alberta, Edmonton, Canada
来源：
Microsystems and Nanoengineering | 2022年 / 8卷 / 01期
关键词：
Ultrasonic transducers;
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