Experimental and simulation study of a capacitively coupled radiofrequency plasma with a structured electrode

被引：0
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作者：
Ďurian, Ján [1 ]
Hartmann, Peter [2 ]
Matejčík, Štefan [1 ]
Gibson, Andrew R [3 ,4 ]
Donkó, Zoltán [2 ]
机构：
[1] Department of Experimental Physics, Faculty of Mathematics, Physics and Informatics, Comenius University in Bratislava, Mlynská Dolina F2, Bratislava,84248, Slovakia
[2] Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Konkoly Thege Miklós Str., Budapest,1121 29-33, Hungary
[3] Institute of Electrical Engineering and Plasma Technology, Ruhr-Universität Bochum, Universitätsstraße 150, Bochum,44801, Germany
[4] Research Group for Biomedical Plasma Technology, Ruhr-Universität Bochum, Universitätsstraße 150, Bochum,44801, Germany
来源：
Plasma Sources Science and Technology | 2022年 / 31卷 / 09期
关键词：
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摘要：
Electrodes
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