Scanning error detection and compensation algorithm for white-light interferometry

被引：0
|
作者：
Cui, Kaihua [1 ]
Liu, Qian [1 ]
Huang, Xiaojin [1 ]
Zhang, Hui [1 ]
Li, Lulu [1 ]
机构：
[1] Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, 64th Mianshan Road, Mianyang,Sichuan,621000, China
来源：
Optics and Lasers in Engineering | 2022年 / 148卷
关键词：
21;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] Theoretical limits of scanning white-light interferometry signal evaluation algorithms
    Fleischer, M
    Windecker, R
    Tiziani, HJ
    APPLIED OPTICS, 2001, 40 (17) : 2815 - 2820
  • [32] EFFECT OF NONLINEAR WAVELENGTH SCANNING TO FOURIER TRANSFORM WHITE-LIGHT INTERFEROMETRY
    Jiang, Yi
    Tang, Caijie
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2009, 51 (02) : 426 - 432
  • [33] Fringe modulation skewing effect in white-light vertical scanning interferometry
    Harasaki, Akiko
    Wyant, James C.
    2000, Optical Society of America (OSA) (39):
  • [34] Theoretical limits of scanning white-light interferometry signal evaluation algorithms
    Fleischer, Matthias
    Windecker, Robert
    Tiziani, Hans J.
    Applied Optics, 2001, 40 (17): : 2815 - 2820
  • [35] Fringe modulation skewing effect in white-light vertical scanning interferometry
    Harasaki, A
    Wyant, JC
    APPLIED OPTICS, 2000, 39 (13) : 2101 - 2106
  • [36] Reduction of chromatic aberration influences in vertical scanning white-light interferometry
    Lehmann, Peter
    Kuehnhold, Peter
    Xie, Weichang
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2014, 25 (06)
  • [37] Dispersion error of a beam splitter cube in white-light spectral interferometry
    Hlubina, P.
    Lunacek, J.
    Ciprian, D.
    Chlebus, R.
    OPTO-ELECTRONICS REVIEW, 2008, 16 (04) : 439 - 443
  • [38] Compensation of phase change on reflection in white-light interferometry for step height measurement
    Park, MC
    Kim, SW
    OPTICS LETTERS, 2001, 26 (07) : 420 - 422
  • [39] White-light interferometry with depolarization of the radiation
    É. I. Alekseev
    E. N. Bazarov
    Technical Physics Letters, 1997, 23 : 560 - 561
  • [40] White-light interferometry with depolarization of the radiation
    Alekseev, EI
    Bazarov, EN
    TECHNICAL PHYSICS LETTERS, 1997, 23 (07) : 560 - 561
12345