Scanning error detection and compensation algorithm for white-light interferometry

被引：0
|
作者：
Cui, Kaihua [1 ]
Liu, Qian [1 ]
Huang, Xiaojin [1 ]
Zhang, Hui [1 ]
Li, Lulu [1 ]
机构：
[1] Institute of Machinery Manufacturing Technology, China Academy of Engineering Physics, 64th Mianshan Road, Mianyang,Sichuan,621000, China
来源：
Optics and Lasers in Engineering | 2022年 / 148卷
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